Graphene MEMS capacitive microphone: highlight and future perspective

Rahmat Zaki Auliya HM; Mohd Anuar Md Ali; Mohd Syakirin Rusdi

Graphene MEMS capacitive microphone: highlight and future perspective

Rahmat Zaki Auliya HM, Mohd Anuar Md Ali, Mohd Syakirin Rusdi

Abstract

MEMS microphone is widely used in the electronic product nowadays because of its tiny size body, low power consumption and performance consistency over time and temperature. This paper highlights on the MEMS capacitive microphone and future perspective. This paper discusses the working principle of capacitive-based MEMS microphone and some of the important performance parameter that must be considered for the MEMS microphone. Recent MEMS microphone technology incorporates graphene as the microphone membrane. Finally, we discuss the future prospect and the possibility for graphene usage as the membrane for MEMS microphone.

Keywords

capacitive microphone; diaphragm; graphene; MEMS microphone

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References

Microphone, in Van Nostrand’s Scientific Encyclopedia, John Wiley & Sons, Inc., 2005.

G. Rasmussen, P. Rasmussen, Acoustical Transducer Principles and Types of Microphones, in Handbook of Noise and Vibration Control, John Wiley & Sons, Inc., 2007, p. 435 443.

N. Hall, Electrostatic MEMS Microphones, in Encyclopedia of Nanotechnology SE - 317, B. Bhushan, Ed. Springer Netherlands, 2012, p. 775–783.

Y. Jung, Y.H. Lee, J. Kwak, S. Hur, Development of Capacitive Type Mems Microphone With Simullation and Electro-Mechanical Characterization, in XX IMEKO World Congress Metrology for Green Growth, 2012.

C.T. Yang, J. Mar. Sci. Technol., 18 (2010) 6.

A.S. Sezen, J. Biomech. Eng., 127 (2005) 6.

M.J. Crocker, General Introduction to Noise and Vibration Transducers, Measuring Equipment, Measurements, Signal

Acquisition, and Processing, Handb. Noise Vib. Control, 2007. p. 415–434,

D. Todorovi, A. Matkovi, M. Mili, 2D Mater., 2 (2015) 4.

Q. Zhou, J. Zheng, S. Onishi, M. F. Crommie, A.K. Zettl, Graphene electrostatic microphone and ultrasonic radio, Proc. Natl. Acad. Sci., 112 (2015) 29.

D. Gee, H. Liu, L. Currano, Y. Miao, Enhanced directional

sensitivity of a biomimetic MEMS acoustic localization sensor, in Proceedings of SPIE - The International Society for Optical Engineering, 2010, vol. 7682.

L. J. Currano, H. Liu, D. Gee, B. Yang, M. Yu, Microscale implementation of a bio-inspired acoustic localization device, in Proceedings of SPIE - The International Society for Optical Engineering, 2009, vol. 7321, p. 73210B–73210B–8.

A. Reid, J.F.C. Windmill, D. Uttamchandani, Procedia Eng., 120 (2015).

H. Tian, C. Li, M.A. Mohammad, Y.L. Cui, W.T. Mi, Y.Yang, D. Xie, T.L. Ren, ACS Nano, 8 (2014) 6.

P. Gaskell, R.E. Gaskell, J.W. (Jonathan) Hong, T. Szkopek, Graphene Oxide Based Materials as Acoustic Transducers: A Ribbon Microphone Application Case Study, in Audio Engineering Society Convention 137, 2014.

C. Li, J. Xiao, T. Guo, S. Fan, W. Jin, Mater. Res. Innov., 19 (2015) S5.

C. Li, Q. Liu, X. Peng, S. Fan, Opt. Express, 23 (2015) 21.